Filter regeneration and recycling

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Reacto Clean

Etch, Dissolve
decompose,and break interactions by
Chemical Reactions and Molecular Interactions.

Reacto Clean

Improved Penetration into smaller pores with
less viscous and high diffusivity liquid.

SonaClean

Etch, Dissolve
decompose,and break interactions by
Chemical Reactions and Molecular Interactions.

• Filter accuracy: 2nm to 0.1 um

• Material: PTFE filter membrane / PFA material

• Form: Disposable, Cartridge

• Cleanliness:

• Total metals < 2ug/device (10”)

• NVR < 0.2mg/device

• Application: Downsizing of high-grade PTFE filter elements, use as pre-filter elements, additional series filters, and replacement of price-sensitive non-PTFE processes

• Others: Developed in collaboration with ITRI