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Technology & Services

From media selection to on-site validation, cleanliness analysis and PTFE reclaim — full technical support.

What We Do

Service Scope

01

Retention Validation

Particle challenge tests and retention rate evaluation tailored to your process conditions.

02

Metal Cleanliness (ICP-MS)

Metal extractable measurement with ICP-MS, reporting to semiconductor-grade specs.

03

Organic Cleanliness

Extraction and TOC testing to quantify compatibility with target solvents.

04

Custom Validation

Custom test protocols and report formats for special chemicals and process conditions.

05

PTFE Reclaim

PTFE filter cleaning, reclaim and cleanliness verification to extend life and cut cost.

Reclaim & Recycle

PTFE Filter Reclaim & Recycling

Co-developed with ITRI — a proprietary filter reclaim process (patent pending).

Retention
2nm to 0.1μm
Material
PTFE membrane / PFA components
Format
Disposable, cartridge
Cleanliness
Total metals < 2μg/device (10"); NVR < 18mg/device
Applications
Down-rating high-grade PTFE filters, pre-filters, added series filters, replacing cost-sensitive non-PTFE processes
Other
Proprietary reclaim process co-developed with ITRI (patent pending)
Proprietary Reclaim Process (patent pending)
ReactoClean

Etch, dissolve, decompose, and break interactions by chemical reactions and molecular interactions

PeneClean

Improved penetration into smaller pores with less viscous and high diffusivity liquid

SonaClean

Provide external energy source to dislocate impurities and overcome desorption energy barrier

9-Step Proposed BKM | 4 MODULES 9 STEPS

Filter Reclaim Cleaning Flow

Treated stage by stage per contaminant class: conditioning / pre-wet → organics → metals → silica → final aqueous exchange.

01Conditioning & Pre-wetSTEPS 1–3
1UPW preclean
1 L · one-pass · Gigasonic
Remove residual acid / pre-wash aqueous contaminants
2IPA preclean
1 L · 30 min · Gigasonic
Pre-wet / pre-wash organic-phase contaminants
3UPW exchange
1 L · one-pass · Gigasonic
IPA → UPW, back to aqueous phase
02Organics RemovalSTEPS 4–5
41% SPM clean
1 L · 10 min · Gigasonic
Oxidize organics / crack higher-MW species
5UPW rinse
1 L · one-pass · Gigasonic
Remove residual acid / back to aqueous phase
03Metals RemovalSTEPS 6–7
65% aqua regia vapor
100 mL · vapor · 10 min
Heated aqua regia vapor removes metallic contaminants
7UPW rinse
1 L · one-pass · Gigasonic
Remove residual acid / back to aqueous phase
04Silica Removal & FinalSTEPS 8–9
81% HF + 1% HNO₃
1 L · 10 min · Gigasonic OFF
Remove silica-class contaminants
9UPW final rinse
1 L · one-pass · Gigasonic
Remove residual acid / complete aqueous exchange
Common UPW exchange
1 L · one-pass · Gigasonic · endpoint = pH / conductivity
Material gate
HF / strong-oxidizer tolerant media only; stainless-steel parts require a split recipe
Measured Data

10nm PTFE Reclaim — Measured Data

New vs. reclaimed cartridges side by side — retention and cleanliness both meet new-part levels.

MetricUnit / SpecNew filterReclaimed
Organics (long-chain) C12–C30 LHCmg/device<0.5 ppm<0.5 ppm
Organics (non-volatile residue) NVRmg/device10nm spec = 183.51.8
Metals — 23 metals extractionppt (ng/device)10nm spec = 3500 ppt330.5353.2
Retention — GNP 5nm%99.4%99.3%
Laboratory

End-to-End Micro-Contamination Consulting

From applications engineering to contract testing and knowledge transfer — helping customers get micro-contamination control right.

01

Applications Engineering

Applications Engineering
  • Metal, organic and particle removal efficiency testing of filters across acids, bases and organic solvents
  • Optimizing the overall filtration and purification flow to reduce contamination and defects
  • Cost evaluation of filter compatibility in wet etch, clean and photoresist process chemicals
02

Analysis & Contract Testing

Analysis
  • Extraction and retention testing of new/used filters and process components (tubing, packaging)
  • Contaminant detection services and general contract laboratory services
03

Knowledge Transfer

Knowledge Transfer
  • Qualitative and quantitative method development and transfer
  • Helping laboratories develop innovative measurement techniques
  • Optimizing 4M1E (man, machine, material, method, environment) for micro-contamination metrology reliability
  • Micro-contamination control courses, training and consulting

Contract Testing Workflow

A transparent laboratory workflow — from filter and membrane testing through to micro-contamination analysis.

01
Receive customer requirement
02
Receive samples
03
Customer internal review
04
Laboratory review
05
Quotation
06
Project start
07
Laboratory testing
08
Test report & walkthrough
09
Customer feedback
10
Additional checks & explanation
11
Customer closure
12
Sample disposal (1 month)
13
Follow-up
14
Micro-contamination control recommendations
Validation

Filter & Membrane Validation

A complete filter and membrane test platform.

Physical properties & morphology
Pore size distribution
Pore size testing
Pore morphology
Morphology
Filter performance
Integrity & flow
Integrity / Flow rate
Retention
Retention
Cleanliness
Organic extractables
Organics
Metal extractables
Metals
Particle shedding
Particle

Instrumentation

Porometer
PMI
Pore size 2nm – 500μm
Capillary flow porometry or liquid-liquid porometry
SEM
Hitachi
Resolution <2nm
Both top-view and cross-section imaging
Integrity Tester
Custom-built
All sizes and formats
Air pressure at the 30psi standard, or per customer requirement
ICPMS / ICPQQQ
Agilent
Detection limit 1ppt
Common 30 metals plus silicon, boron, sulfur, phosphorus
GCMS
Agilent
Detection limit 1ppb – 100ppb
Solvents IPA / hexane / OK73; targets LHC long-chain hydrocarbons, phthalates, etc.
DMA-CPC
ITRI
Detection limit ≥100 particles/mL (chemistry dependent)
Solvents UPW / IPA / OK73 and others

Full Analytical Scope

Delivered through our own laboratory together with major analytical laboratories nationwide.

ICPMSICPQQQDMA-CPCGCMSPorometerNVRSEM / EDSFTIRAFMVPD-ICPMSTitrationRetention TestIntegrity TestFlow Rate TestLoading CapacityGCLCMSLPCLCWafer DefectTOCICOthers
Contact Us

Need filter validation or a reclaim assessment?

Tell us your chemistry, process conditions and current filter spec — our technical team will come back with a workable test plan and timeline.

Contact our team