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Home/Products/Pleated Cartridge Filters/Semi-grade All-PTFE Pleated Filter

Pleated Cartridge Filters

Semi-grade All-PTFE Pleated Filter

Product ID: semi-grade-all-ptfe-cartridge-filter|Semi-grade All-PTFE

Flagship perfluoro filter element specially designed for semiconductor wet processes. It adopts high-flow PTFE filter membrane with PFA skeleton, which has precise interception capability from 10nm to 0.2µm. It is resistant to extreme chemicals such as SC1, SC2, 49% HF, HNO3 and NMP, provides ultra-low extractables and excellent temperature resistance (up to 180°C), and is the guardian of advanced process yield.

100% all-fluoropolymer build: high-flow PTFE membrane with PFA core
10nm to 0.2µm fine retention safeguarding advanced-process yield
Withstands SC1, SC2, 49% HF, HNO3 and NMP extreme chemicals
Outstanding temperature resistance up to 180°C
Ultra-low extractables ensuring absolute chemical purity
Flagship-grade design built for semiconductor wet processes

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Micron rating: 10 nm – 10 µm
Max operating temperature: Cartridge 100 °C
Effective filtration area: Ø68 mm: 1.2 m²/10"
Nominal lengths: 3" / 4" / 10" / 20" / 30"

Applications

Semiconductor wet-process chemical filtration

49% hydrofluoric acid (HF) filtration

SC1/SC2 cleaning solution filtration

Nitric acid (HNO3) filtration

High-temperature solvent (NMP) filtration

Specifications

Filter media / membrane: PTFE microporous membrane, high-flow grade — the retentive layer is itself a fluoropolymer
Support & drainage layers: PFA support & drainage layers — same fluoropolymer family as the membrane, so the flow path has no dissimilar-material interface
Cage, core & end caps: PFA cage, core and end caps; thermally bonded with no adhesives and no metal parts anywhere in the build
Seals / O-rings: TEV (modified EPDM) or FFKM perfluoroelastomer O-rings, 222 style
Micron rating: 10 nm / 15 nm / 20 nm / 30 nm / 50 nm / 0.1 µm / 0.2 µm / 0.45 µm / 0.5 µm / 1 µm / 3 µm / 5 µm / 10 µm
Effective filtration area: Ø68 mm: 1.2 m²/10"; Ø83 mm: 1.8 / 2.2 / 2.8 m²/10"
Nominal outer diameter: Ø68 mm / Ø83 mm
Nominal lengths: 3" / 4" / 10" / 20" / 30"
End cap / connection: 222 flat; 222 with lock-key
Max operating temperature: Cartridge 100 °C; disposable 180 °C
Max forward differential pressure: 0.5 MPa (72 psi) @ 25 °C; 0.2 MPa (29 psi) @ 100 °C
Max reverse differential pressure: 0.35 MPa (50 psi) @ 25 °C
Wetting & flushing: Hydrophobic membrane supplied dry or UPW pre-wet; the pre-wet option removes the wetting and flush-out step at start-up
Extractables & cleanliness: Selectable metal cleanliness at < 3 / < 10 / < 25 µg/device; the all-fluoropolymer build keeps extractables and other process contaminants extremely low
Integrity test: 100% integrity tested before shipment
Packaging: Dry packed; UPW pre-wet packed

Code	Outer diameter	Membrane area (10")
SX	Ø68 mm	1.2 m²
MX	Ø83 mm	1.8 m²
MY	Ø83 mm	2.2 m²
MZ	Ø83 mm	2.8 m²

Note: actual compatibility and service life depend on chemical concentration, temperature, flow, differential pressure, upstream contamination load and housing design. Validate under your real process conditions.

Part Number BuilderJY-WE21

Example part number

-WE21

JY: JIUNYUAN Technology
WE21: Hydrophobic PTFE, all-PFA hardware
83: Ø83 mm
R10: 10 nm
20: 20"
K2W: FFKM O-ring | grade 2 | UPW pre-wet

Selectable options by segment

Outer diameter

Code	Specification
68	Ø68 mm
83	Ø83 mm

Retention rating

Code	Specification
R10	10 nm
R15	15 nm
R20	20 nm
R30	30 nm
R50	50 nm
P10	0.1 µm
P20	0.2 µm
P45	0.45 µm
P50	0.5 µm
M001	1 µm
M003	3 µm
M005	5 µm
M010	10 µm

Length

Code	Specification
03	3"
04	4"
10	10"
20	20"
30	30"

O-ring material

Code	Specification
V	TEV (modified EPDM)
K	FFKM perfluoroelastomer
T	TEE (PFA-encapsulated EPDM)

Cleanliness grade

Code	Specification
1	< 0.5 µg/device (highest)
2	< 1 µg/device
3	< 3 µg/device
4	< 10 µg/device
5	< 25 µg/device
6	< 40 µg/device (standard)

Lower grade number = cleaner. Figures are total metal extractables per device. Grades 1–3 require fluoropolymer hardware.

Packaging

Code	Specification
D	Dry packed
W	UPW pre-wet packed

Not every combination is a stock item; uncommon combinations are made to order. Confirm with JIUNYUAN sales before ordering.

Dimensions

Single open end, 222 flatDrawing shows one representative size; the table below gives the exact diameter and length of each code.

Diameter / nominal length	A	B	C
Ø68 mm　4"	122.0 ± 2 mm	108.0 ± 2 mm	98.5 ± 2 mm
Ø68 mm　10"	263.0 ± 2 mm	249.0 ± 2 mm	239.5 ± 2 mm
Ø68 mm　20"	511.0 ± 2 mm	497.0 ± 2 mm	487.5 ± 2 mm
Ø83 mm　4"	125.0 ± 2 mm	107.0 ± 2 mm	105.0 ± 2 mm
Ø83 mm　10"	245.0 ± 2 mm	227.0 ± 2 mm	225.0 ± 2 mm
Ø83 mm　20"	471.0 ± 2 mm	453.0 ± 2 mm	451.0 ± 2 mm

A = overall length; B = seal face to seal face; C = effective media length.

Flow vs. Differential Pressure

UPW at 25 °C, single Ø68 mm 10" cartridge (1.2 m²), clean initial ΔP　Right axis shows the same values in psi.

For multiple cartridges, per-cartridge flow = total flow ÷ count. A 20" cartridge shows roughly half the ΔP of a 10".

View data table

GPM / LPM	20 nm	30 nm	50 nm	0.1 µm	0.2 µm
2.00 / 7.57	11.4	9.59	6.91	5.22	4.93
4.00 / 15.1	22.8	19.2	13.8	10.4	9.86
6.00 / 22.7	34.2	28.8	20.7	15.6	14.8
8.00 / 30.3	45.5	38.4	27.6	20.9	19.7
10.0 / 37.9	56.9	48.0	34.5	26.1	24.7

Chemical Compatibility

Chemical	PTFE
— 酸 —
Glacial acetic acid	R
Hydrochloric acid, conc.	R
Hydrochloric acid, 6N	R
Nitric acid, conc.	R
Nitric acid, 6N	R
Phosphoric acid, conc.	R
Sulfuric acid, conc.	R
Hydrofluoric acid, 6N	R
— 鹼 —
Ammonium hydroxide, 1N	R
Ammonium hydroxide, 3N	R
Potassium hydroxide, 3N	R
Sodium hydroxide, 3N	R
Sodium hydroxide, 6N	R
— 醇類 —
Amyl alcohol	R
Benzyl alcohol	R
Butanol	R
Isopropyl alcohol (IPA)	R
Methanol	R
— 酮類 —
Acetone	R
Cyclohexanone	R
Methyl ethyl ketone (MEK)	R
Methyl isobutyl ketone (MIBK)	R
— 油類 —
Cottonseed oil	R
Lubricating oil	R
Peanut oil	R
Sesame oil	R
— 芳香烴 —
Benzene	R
Toluene	R
Xylene	R
— 鹵代烴 —
Carbon tetrachloride	R
Chloroform	R
Ethylene dichloride	R
Freon TF	R
Freon TMC	R
Dichloromethane	R
Perchloroethylene	R
Trichloroethylene	R
— 二醇類 —
Ethylene glycol	R
Glycerol	R
Propylene glycol	R
— 醚類 —
Diethyl ether	R
Isopropyl ether	R
Dioxane	R
Tetrahydrofuran (THF)	R
— 酯類 —
Amyl acetate	R
Butyl acetate	R
Cellosolve acetate	R
Ethyl acetate	R
Methyl acetate	R
Isopropyl acetate	R
— 其他 —
Aniline	R
Dimethylformamide (DMF)	R
Formaldehyde, 37%	R
Gasoline	LR
Hexane (anhydrous)	LR
Kerosene	R
Phenol	R
Pyridine	R
Water	R
Acetonitrile	R

R = resistant
LR = limited resistance, validate on site
NR = not resistant
— = no data

Ratings are general material-level guidance, not guarantees. Actual concentration, temperature, exposure time and mechanical stress all affect the outcome — validate with samples under your real process conditions before adoption.

Details

Where it fits

Process position.Point-of-use filtration for high-temperature and aggressive chemistries: hot H₂SO₄, H₃PO₄, HNO₃, SPM, SC1 and SC2. The 180°C ceiling is the reason this series exists — no other material survives that range.

All-fluoropolymer construction

Key characteristics

Key features.Membrane, support, core and end caps are all fluoropolymer; no non-fluorinated material contacts the fluid. Two consequences follow: very broad chemical compatibility, and the lowest metal and contaminant extraction — cleanliness grades down to < 0.5 µg/device.

180°C rating

Usable directly in hot SPM and concentrated sulfuric acid without lowering process temperature or adding cooling to protect the filter.

For sustained service above 120°C, pair with a pre-wet procedure and conservative ΔP management. Below 120°C with frequent drain-down, the modified PTFE version (JY-WE22) is easier to operate.

The widest retention range

Full coverage from 10nm to 10µm means one material platform serves everything from point-of-use polishing to upstream coarse filtration, simplifying inventory and qualification work.

Quick-change connection option

With the dedicated all-fluoropolymer housing, a quick-change structure lets operators change elements without touching the element body, reducing exposure to hot aggressive acids.

Choosing between options

Choosing among the PTFE series.

Series	Hardware	Max temp	Finest rating	Relative cost	Best for
JY-WE21 (this)	PFA	180°C	10nm	Highest	Hot SPM, concentrated sulfuric / phosphoric acid
JY-WE22	PFA	120°C	2nm	High	Ambient to mid temperature, frequent drain-down
JY-WE24	PP	90°C	20nm	Medium	General solvents and dilute acid/base
JY-WE23	HDPE	70°C	20nm	Low	Low temperature, cost sensitive

FAQ

What chemicals can it withstand?

This All-PTFE filter withstands extreme chemicals including SC1, SC2, 49% HF, HNO3 and NMP. Its 100% all-fluoropolymer build of PTFE membrane and PFA core gives very broad resistance, a flagship choice for strong acid, base and aggressive solvent processes.

Why does the 180°C rating matter?

Resistance to 180°C lets it serve high-temperature chemicals such as hot NMP and high-temperature cleaning while tolerating thermal cycling. With the all-fluoropolymer build and ultra-low extractables, it keeps chemicals pure at high temperature to protect yield.

Why all-fluoropolymer for advanced nodes?

Advanced nodes are highly sensitive to micro-contamination. An all-fluoropolymer (PTFE/PFA) build gives ultra-low extractables and broad chemical resistance, and with 10nm retention stays pure even in 49% HF, protecting yield in ways economical options cannot.

Semi-grade All-PTFE Pleated Filter

Outer diameter

Retention rating

Length

O-ring material

Cleanliness grade

Packaging

Where it fits

All-fluoropolymer construction

Key characteristics

180°C rating

The widest retention range

Quick-change connection option

Choosing between options

Glass Fiber Pleated Filter

Hydrophilic PTFE Nano Filter

Hydrophilic PTFE Pleated Filter

Further Reading

Chemical Compatibility Guide for Filter Material Selection

Why All Teflon Filter Housings Are Essential in Strong Acid and Alkali Environments: A Materials Science Analysis

How Wrong Filter Selection Hurts Wafer Yield