- Filter media / membrane
- PTFE microporous membrane, high-flow grade — the retentive layer is itself a fluoropolymer, rated for continuous contact with SC1, SC2, 49% HF, HNO₃, EKC and NMP
- Support & drainage layers
- PFA perfluorinated support and drainage layers — the same fluoropolymer family as the membrane, so the flow path has no dissimilar-material interface
- Body material
- One-piece PFA shell, core and end caps, thermally bonded with no adhesives and no metal parts anywhere in the build; element and shell are welded together so a change-out never opens the wetted path
- Seals / O-rings
- No main O-ring — the body is thermally welded; port O-rings in FFKM perfluoroelastomer or TEE (PFA-encapsulated EPDM), with FFKM recommended for strongly oxidising and hot chemistries
- Micron rating
- 10 nm / 15 nm / 20 nm / 30 nm / 50 nm / 0.1 µm / 0.2 µm / 0.45 µm / 1 µm
- Effective filtration area
- Internal element Ø68 mm: 1.2 m²/10"; Ø83 mm: 1.8 / 2.2 / 2.8 m²/10"
- Inlet / outlet connections
- Inlet/outlet 3/8", 1/2", 3/4" or 1" in flare or Super Pillar all-fluoropolymer fittings; available as in-line, T-flow, and T-flow with core vent
- Hold-up volume
- The one-piece fluoropolymer build keeps the internal volume small; an in-line body holds noticeably less than a T-flow body, so both chemical loss at change-out and the subsequent flush volume are lower. Actual figures depend on configuration and port size
- Vent & drain
- In-line bodies take a 1/4" vent/drain projecting 35 mm; T-flow bodies take 1/2". A T-flow with core vent variant vents the inside of the element through the core, shortening start-up de-aeration
- Max operating temperature
- 180 °C
- Max forward differential pressure
- 0.58 MPa (84 psi) @ 25 °C; 0.1 MPa (15 psi) @ 180 °C
- Recommended change-out ΔP
- Single-use construction — it is not cleaned or regenerated. Set the change-out ΔP from your process SOP; common practice is 3–5× the clean initial ΔP or half the housing design pressure, whichever comes first
- Sterilisation
- Supplied non-sterile for semiconductor wet process duty; the all-fluoropolymer build is rated to 180 °C and tolerates hot chemistry and hot UPW flushing
- Wetting & flushing
- Hydrophobic membrane supplied dry or UPW pre-wet; the pre-wet option removes the wetting and flush-out step at start-up, while a dry unit must be wetted out before it reaches the rated flow
- Extractables & cleanliness
- Metal cleanliness selectable at < 0.5 / < 3 / < 10 µg/device with an electronic grade also available; the all-fluoropolymer build keeps extractables and other process contaminants extremely low
- Integrity test
- 100% integrity tested before shipment
- Packaging
- Dry packed; UPW pre-wet packed
- Regulatory & validation
- Assembled, cleaned and packed in a cleanroom; the adhesive-free, metal-free fluoropolymer build addresses advanced-node limits on metal and organic contamination
Note: actual compatibility and service life depend on chemical concentration, temperature, flow, differential pressure, upstream contamination load and housing design. Validate under your real process conditions.
